Chemical Mechanical Polishing

Kupukuta kwa Chemical-Mechanical (CMP) nthawi zambiri kumakhudzidwa ndi kupanga malo osalala ndi machitidwe amankhwala, makamaka amagwira ntchito pamakampani opanga semiconductor.Lonnmeter, woyambitsa wodalirika yemwe ali ndi zaka zopitilira 20 zaukadaulo woyezera ndende ya inline, amapereka zamakonosanali nyukiliya kachulukidwe mamitandi ma viscosity sensors kuti athane ndi zovuta za kasamalidwe ka slurry.

Kufunika kwa Ubwino wa Slurry ndi Katswiri wa Lonnmeter

The chemical mechanical polishing slurry ndiye msana wa ndondomeko ya CMP, kudziwa kufanana ndi khalidwe la malo. Kusakhazikika kwa slurry kapena viscosity kumatha kubweretsa zolakwika ngati zong'onoting'ono, kuchotsa zinthu zosagwirizana, kapena kutsekeka kwa ma pad, kusokoneza mtundu wa wafer ndikuwonjezera mtengo wopangira. Lonnmeter, mtsogoleri wapadziko lonse lapansi pakuyezera zoyezera zamafakitale, amagwira ntchito yoyezera matope kuti awonetsetse kuti slurry ikuyenda bwino. Pokhala ndi mbiri yotsimikizika yopereka masensa odalirika, olondola kwambiri, Lonnmeter yagwirizana ndi otsogola opanga semiconductor kuti apititse patsogolo kuwongolera ndi kuyendetsa bwino ntchito. Mamita awo omwe si a nyukiliya osalimba a nyukiliya komanso masensa akunyukiliya amapereka chidziwitso chanthawi yeniyeni, zomwe zimathandizira kusintha kolondola kuti zisungidwe mosasinthasintha ndikukwaniritsa zofunikira zopanga ma semiconductor amakono.

Zopitilira zaka makumi awiri zoyezera ndende, zodalirika ndi makampani apamwamba a semiconductor. Masensa a Lonnmeter amapangidwa kuti aziphatikizana mopanda phokoso komanso kukonza zero, kuchepetsa ndalama zogwirira ntchito.Mayankho ogwirizana kuti akwaniritse zofunikira za ndondomeko, kuonetsetsa kuti zokolola zambiri zophikidwa ndi kutsata.

Udindo wa Chemical Mechanical polishing mu Semiconductor Manufacturing

Chemical mechanical polishing (CMP), yomwe imatchedwanso chemical-mechanical planarization, ndi mwala wapangodya wa kupanga semiconductor, kupangitsa kuti pakhale malo osalala, opanda chilema kuti apange chip chapamwamba. Mwa kuphatikiza ma etching amankhwala ndi ma abrasion amawotchi, njira ya CMP imatsimikizira kulondola kofunikira kwa mabwalo ophatikizika amitundu yambiri pa node pansi pa 10nm. The mankhwala makina kupukuta slurry, wopangidwa ndi madzi, reagents mankhwala, ndi abrasive particles, interacts ndi kupukuta PAD ndi yopyapyala kuchotsa zinthu uniformly. Pamene mapangidwe a semiconductor akusintha, njira ya CMP imayang'anizana ndi zovuta zambiri, zomwe zimafunikira kuwongolera kolimba kwa zinthu zotayirira kuti ziteteze zolakwika ndikukwaniritsa zowola zosalala, zopukutidwa zomwe zimafunidwa ndi Semiconductor Foundries and Materials Suppliers.

Njirayi ndiyofunikira popanga tchipisi cha 5nm ndi 3nm chokhala ndi zolakwika zochepa, zomwe zimatsimikizira malo athyathyathya kuti asungidwe molondola zigawo zotsatila. Ngakhale kusagwirizana pang'ono kwa slurry kungayambitse kukonzanso kokwera mtengo kapena kutayika kwa zokolola.

Zovuta Pakuwunika Makhalidwe a Slurry

Kusunga kusasinthika kwa slurry kachulukidwe komanso kukhuthala munjira yopukuta yamakina kumadzaza ndi zovuta. Makhalidwe a matope amatha kusiyana chifukwa cha zinthu monga zoyendera, kusungunuka ndi madzi kapena hydrogen peroxide, kusakanizika kokwanira, kapena kuwonongeka kwa mankhwala. Mwachitsanzo, tinthu tating'ono tating'onoting'ono tating'onoting'ono tating'onoting'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono tating'ono timayambitsa kupukuta kopanda yunifolomu. Njira zowunikira zachikhalidwe monga pH, kuthekera kochepetsera okosijeni (ORP), kapena kuwongolera nthawi zambiri kumakhala kosakwanira, chifukwa amalephera kuzindikira kusintha kosawoneka bwino kwa kapangidwe ka slurry. Zolepheretsa izi zimatha kubweretsa zolakwika, kuchepetsa mitengo yochotsera, komanso kuchuluka kwa ndalama zomwe zingagulitsidwe, zomwe zimabweretsa chiopsezo chachikulu kwa opanga zida za semiconductor ndi opereka chithandizo cha CMP. Kusintha kwapang'onopang'ono pakugwira ndi kugawa kumakhudza magwiridwe antchito. Ma sub-10nm node amafunikira kuwongolera kolimba pakuyera kwa slurry ndikuphatikiza kulondola. pH ndi ORP zikuwonetsa kusiyanasiyana pang'ono, pomwe kusinthika kumasiyana ndi ukalamba wocheperako. Kusagwirizana kwa slurry kumatha kukulitsa chiwopsezo mpaka 20%, pamaphunziro amakampani.

Zomverera Zapaintaneti za Lonnmeter Zowunikira Nthawi Yeniyeni

Lonnmeter imathana ndi zovuta izi ndi ma metres ake apamwamba osalimba a nyukiliya komansoma viscosity sensors, kuphatikizapo mamasukidwe akayendedwe mita okhala pakati kwa mu-line mamasukidwe akayendedwe miyeso ndi akupanga kachulukidwe mita kwa munthawi yomweyo slurry kachulukidwe ndi mamasukidwe akayendedwe kuwunika. Masensa awa adapangidwa kuti aziphatikizana mosagwirizana ndi njira za CMP, zokhala ndi maulumikizidwe amakampani. Mayankho a Lonnmeter amapereka kudalirika kwanthawi yayitali komanso kukonza pang'ono pakumanga kwake kolimba. Deta yanthawi yeniyeni imathandizira ogwiritsa ntchito kukonza bwino zosakanikirana za slurry, kuteteza zolakwika, ndi kukhathamiritsa magwiridwe antchito, kupangitsa zidazi kukhala zofunika kwambiri kwa Analysis and Testing Equipment Suppliers ndi CMP Consumables Suppliers.

Ubwino Wopitiriza Kuwunika kwa CMP Kukhathamiritsa

Kuwunika mosalekeza ndi masensa apakati a Lonnmeter kumasintha njira yopukutira ndi makina popereka zidziwitso zomwe zingatheke komanso kupulumutsa ndalama. Kuyeza kachulukidwe ka nthawi yeniyeni ndi kuyang'anira kukhuthala kumachepetsa zilema ngati zokala kapena kupukuta mopitilira muyeso mpaka 20%, malinga ndi zizindikiro zamakampani. Kuphatikizika ndi dongosolo la PLC kumathandizira madontho odziyimira pawokha ndikuwongolera njira, kuwonetsetsa kuti katundu wa slurry amakhala m'mizere yoyenera. Izi zimabweretsa kutsika kwa 15-25% pamitengo yogwiritsidwa ntchito, kuchepetsa nthawi yopumira, komanso kusinthika kwamafuta ophatikizika. Kwa Semiconductor Foundries ndi CMP Services Providers, maubwino awa amamasulira kukulitsa zokolola, mapindu apamwamba, komanso kutsatira miyezo ngati ISO 6976.

Mafunso Wamba Okhudza Kuwunika kwa Slurry mu CMP

Chifukwa chiyani kuyeza kachulukidwe ka slurry ndikofunikira pa CMP?

Kuyeza kachulukidwe ka slurry kumawonetsetsa kugawidwa kwa tinthu ting'onoting'ono ndikuphatikizana kosasinthika, kuteteza zolakwika ndikuwongolera mitengo yochotsera pamakina opukutira. Imathandizira kupanga kwapamwamba kwambiri komanso kutsata miyezo yamakampani.

Kodi kuwunika kwa mamachulukidwe kumathandizira bwanji CMP?

Kuwunika kwa viscosity kumapangitsa kuti madzi aziyenda mosasinthasintha, kuteteza zinthu monga kutsekeka kapena kupukuta mosiyanasiyana. Masensa apakati a Lonnmeter amapereka zenizeni zenizeni kuti akwaniritse bwino ntchito ya CMP ndikuwongolera zokolola zopyapyala.

Ndi chiyani chomwe chimapangitsa kuti mita ya Lonnmeter slurry density metres kukhala yapadera?

Mamita osalimba a nyukiliya a Lonnmeter amapereka miyeso ya kachulukidwe ndi mamasukidwe munthawi imodzi yolondola kwambiri komanso kukonza ziro. Mapangidwe awo olimba amatsimikizira kudalirika pamachitidwe ofunikira a CMP.

Muyezo wanthawi yeniyeni wa slurry density ndi kuwunika kwa viscosity ndikofunikira pakuwongolera njira yamakina opukutira pamakina opanga ma semiconductor. Lonnmeter's non-nuclear slurry density meters and viscosity sensors amapereka Semiconductor Equipment Manufacturers, CMP Consumables Suppliers, ndi Semiconductor Foundries ndi zida zothana ndi zovuta zowongolera slurry, kuchepetsa zolakwika, komanso kutsika mtengo. Popereka zolondola, zenizeni zenizeni, mayankhowa amathandizira magwiridwe antchito, kuwonetsetsa kutsata, ndikuyendetsa phindu pamsika wampikisano wa CMP. PitaniWebusayiti ya Lonnmeterkapena funsani gulu lawo lero kuti mudziwe momwe Lonnmeter ingasinthire ntchito zanu zamakina opukuta.

Chitanipo Tsopano

Nthawi yotumiza: Jul-22-2025